Patent · US Active

Tungsten-rhenium composite thin film thermocouple based on surface micropillar array with gas holes

US11598676B2 · kind B2 · utility

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1References
7Claims
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Key dates

Filing dateJun 23, 2022
Grant dateMar 7, 2023
Priority date
Expiry dateJun 23, 2042

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01K7/021
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Provided herein is a tungsten-rhenium composite thin film thermocouple based on a surface micropillar array with gas holes. A tungsten-rhenium thin film thermocouple is arranged on a surface of a flat alumina ceramic substrate. Two tails of the tungsten-rhenium thin film thermocouple are respectively connected to a lead wire. A surface of the tungsten-rhenium thin film thermocouple is arrayed with a plurality of micron alumina micropillars to form an alumina micropillar array. Air is filled between the micron alumina micropillars to form the gas holes. The flat alumina ceramic substrate, the tungsten-rhenium thin film thermocouple and the alumina micropillar array form a three-layered laminated structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.