Thickness-shear mode resonators
US11598684B1 · kind B1 · utility
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17Claims
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Key dates
| Filing date | May 14, 2021 |
| Grant date | Mar 7, 2023 |
| Priority date | — |
| Expiry date | Aug 5, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0061
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor that resonates in the thickness-shear mode (TSM) includes a center resonator structure, a first electrode positioned on a first side of the center resonator structure, and a first electrode flag. The first electrode flag forms a first electrically conductive path from the first electrode toward an outer portion of the center resonator structure. The first electrode flag extends at least partially over the first side of the center resonator structure. The first electrode flag also includes one or more first tab metals migrated thereinto from opposing sides of the first electrode flag.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.