Patent · US Active

Joint nanoscale three-dimensional imaging and chemical analysis

US11598734B2 · kind B2 · utility

2Cited by

8References

15Claims

0Family size

Assignee

Luxembourg Institute of Science & Technology (LIST) · LU

Inventors

Tom Wirtz · Grevenmacher, LU
Florian Vollnhals · Erlangen, DE

Key dates

Filing date	May 31, 2019
Grant date	Mar 7, 2023
Priority date	—
Expiry date	May 31, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2611
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for in-situ joint nanoscale three-dimensional imaging and chemical analysis of a sample. A single charged particle beam device is used for generating a sequence of two-dimensional nanoscale images of the sample, and for sputtering secondary ions from the sample, which are analysed using a secondary ion mass spectrometry device. The two-dimensional images are combined into a three-dimensional volume representation of the sample, the data of which is combined with the results of the chemical analysis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.