Using absolute Z-height values for synergy between tools
US11600497B2 · kind B2 · utility
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14Claims
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Key dates
| Filing date | Mar 31, 2020 |
| Grant date | Mar 7, 2023 |
| Priority date | — |
| Expiry date | Jan 9, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor review tool receives absolute Z-height values for the semiconductor wafer, such as a semiconductor wafer with a beveled edge. The absolute Z-height values can be determined by a semiconductor inspection tool. The semiconductor review tool reviews the semiconductor wafer within a Z-height based on the absolute Z-height values. Focus can be adjusted to within the Z-height.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.