Slit homogenizer for spectral imaging
US11604096B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 26, 2019 |
| Grant date | Mar 14, 2023 |
| Priority date | — |
| Expiry date | Aug 1, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/2803
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A spectral imager (100) may use an entrance telescope (10) to spatially image an object (O1), at least in the across-slit direction (X), onto a physical slit (Se) of a spectrometer (20). The spectrometer (20) may include a slit homogenizer (24) such as a rod lens configured to spatially image an aperture stop (AS) in the across-slit direction (X) as a virtual slit image (Ih). Formation of a detection image (Id) which is spectrally resolved along a spectral axis (X′) may includes spatially imaging the virtual slit image (Ih), at least in the across-slit direction (X), at a detector plane (Pd). This may achieve a more homogeneous illumination of the spectrometer slit and improve measurement accuracy and reproducibility.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.