High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement
US11604207B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 24, 2018 |
| Grant date | Mar 14, 2023 |
| Priority date | — |
| Expiry date | Apr 19, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P21/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides a resonant sensor comprising: a substrate; one or more proof masses suspended from the substrate to allow for movement of the one or more proof masses along a sensitive axis; a first resonant element having a first end and a second end, the first resonant element extending between the first end and the second end along the sensitive axis, wherein the first end is connected to the one or more proof masses through a non-inverting lever and the second end is connected to the one or more proof masses through an inverting lever; and an electrode assembly positioned adjacent to the first resonant element. A resonant sensor in accordance the invention comprises a resonant element that is suspended between two proof masses or between two portions of a single proof mass, and so is not connected directly to the substrate. This isolates the resonant element from thermal stress that might otherwise be transferred from the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.