Methods for aligning a light source of an instrument, and related instruments
US11605533B2 · kind B2 · utility
0Cited by
9References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2019 |
| Grant date | Mar 14, 2023 |
| Priority date | — |
| Expiry date | Mar 12, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/0418
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Methods for an instrument including a light source of are provided. A method for an instrument including a light source includes providing light from the light source to a target location in a process chamber. The method includes receiving the light at a sensor. The method includes determining, using data from the sensor, a first position of the light at the target location. Moreover, the method includes determining whether to adjust the light to a second position at the target location. Related instruments are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.