Multifunction magnetic and piezoresistive MEMS pressure sensor
US11605774B2 · kind B2 · utility
0Cited by
3References
13Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 23, 2020 |
| Grant date | Mar 14, 2023 |
| Priority date | — |
| Expiry date | Jul 3, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/032
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Aspects of the subject technology relate to an apparatus including a housing, one or more piezoresistive elements and a magnetic actuator. The housing includes a membrane, and the piezoresistive elements are disposed on the membrane to sense a displacement due to a deflection of the membrane. The magnetic actuator is disposed inside a cavity of the housing. The magnetic actuator exerts a repulsive force onto the membrane to reduce the deflection of the membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.