Piezoelectric device
US11605775B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 22, 2020 |
| Grant date | Mar 14, 2023 |
| Priority date | — |
| Expiry date | Feb 18, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/076
Abstract
In a piezoelectric device, electrode layers are spaced apart from each other in the direction of the normal thereto. A first piezoelectric layer is interposed between two electrode layers of electrode layers in the direction of the normal. A second piezoelectric layer is provided on an opposite side of the first piezoelectric layer from a base portion. The second piezoelectric layer is interposed between two electrode layers of the electrode layers in the direction of the normal. The half-width of a rocking curve measured by X-ray diffraction for a lattice plane of the first piezoelectric layer substantially parallel to a first main surface is smaller than a half-width for the second piezoelectric layer. The piezoelectric constant of a material defining the first piezoelectric layer is smaller than the piezoelectric constant of a material defining the second piezoelectric layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.