Device for cleaning glass substrate and method of cleaning glass substrate
US11607714B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 26, 2019 |
| Grant date | Mar 21, 2023 |
| Priority date | — |
| Expiry date | Jul 26, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C23/0075
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The disclosure provides a device for cleaning a glass substrate and a method of cleaning the glass substrate. The device for cleaning the glass substrate includes a body; a conveying device including a carrying unit for carrying the glass substrate and moving the glass substrate into the body; a cleaning unit disposed in a fixed frame, wherein the cleaning unit includes a nozzle configured to be extended or retracted correspondingly to the glass substrate; and a water pipe unit disposed under the body, wherein the water pipe unit is configured to raise an internal humidity of the body and reduce electrostatic discharge effects caused by the glass substrate entering the body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.