Gas sensing device having distributed gas sensing elements and a method for sensing gas
US11609217B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Sep 4, 2020 |
| Grant date | Mar 21, 2023 |
| Priority date | — |
| Expiry date | Jan 13, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/0027
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for sensing gas by a gas sensing device, the method may include generating, by a semiconductor temperature sensing element that is spaced apart from a gas reactive element and is thermally coupled to the gas reactive element, detection signals that are indicative of a temperature of the gas reactive element; wherein the gas reactive element and the semiconductor temperature sensing element are of microscopic scale; and processing, by a readout circuit of the gas sensing device, the detection signals to provide information about a gas that affected the temperature of the gas reactive element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.