Patent · US Active

Vacuum arc source

US11610760B2 · kind B2 · utility

0Cited by

9References

17Claims

0Family size

Assignee

PLANSEE COMPOSITE MATERIALS GMBH · DE

Inventors

Peter Polcik · Reutte, AT
Szilard Kolozsvari · Lechbruck am See, DE
Igor Zhirkov · Linköping, SE
Johanna Rosen · Linköping, SE

Key dates

Filing date	Mar 13, 2019
Grant date	Mar 21, 2023
Priority date	—
Expiry date	Mar 13, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/332
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A vacuum arc source for arc evaporation of boride includes: a cathode made of at least 90 at-% of boride, in particular made of more than 98 at-% of boride; an anode, which is preferably in the shape of a disk; a body made of a material which is less preferred by arc discharge compared to the cathode, the body surrounding the cathode in such a way that during operation of the vacuum arc source, movement of an arc on an arc surface of the cathode is limited by the body. At least 90 at-% of the material of the anode is of the same chemical composition as the cathode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.