Acoustic wave device
US11611327B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 25, 2020 |
| Grant date | Mar 21, 2023 |
| Priority date | — |
| Expiry date | May 18, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/25
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic wave device includes a piezoelectric substrate a reverse-velocity surface of which is convex, an interdigital transducer electrode disposed on the piezoelectric substrate, and mass addition films stacked above the interdigital transducer electrode. The interdigital transducer electrode includes a central region, first and second edge regions, first and second gap regions located outside the first and second edge regions, first and second inner busbar regions, and first and second outer busbar regions. The mass addition films are stacked in at least the first and second edge regions and the first and second inner busbar regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.