Thin film transistor panel, electric device including the same, and manufacturing method thereof

US11616086B2 · kind B2 · utility

Assignee

• ADRC. CO. KR · KR

Inventors

• Duk Young JEONG · Paju-si, KR
• Chae Yeon HWANG · Seoul, KR
• Dong Gyu Eo · Seoul, KR

Key dates

• Filing date: Dec 17, 2020
• Grant date: Mar 28, 2023
• Expiry date: Mar 25, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D99/00

Abstract

A thin film transistor panel according to an exemplary embodiment includes: a substrate; a first transistor disposed on the substrate and including a first semiconductor layer including a low temperature polysilicon and a first control electrode overlapping the first semiconductor layer; a second transistor disposed on the substrate and including a second semiconductor layer including an oxide semiconductor and a second control electrode overlapping the second semiconductor layer; a first gate insulation layer disposed between the first semiconductor layer and the first control electrode of the first transistor and including a first insulation layer and a second insulation layer; and a second gate insulation layer disposed between the second semiconductor layer and the second control electrode of the second transistor and including the second insulation layer, wherein the density of the first insulation layer may be higher than the density of the second insulation layer, the first semiconductor layer of the first transistor may be in contact with the first insulation layer, and the second semiconductor layer of the second transistor may be in contact with the second insulation laye…