Method for separating substrates
US11618707B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 2, 2019 |
| Grant date | Apr 4, 2023 |
| Priority date | — |
| Expiry date | Oct 19, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P40/57
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method for separating a substrate of a brittle-hard material is provided. The method includes the steps of introducing defects into the substrate at a spacing from one another along a separation line using at least one pulsed laser beam; selecting an average spacing between neighboring defects and a number of laser pulses for generating a respective defect such that a breaking stress (σB) for separating the substrate along the separation line is smaller than a first reference stress (σR1) of the substrate and such that an edge strength σK of the separation edge obtained after separation is greater than a second reference stress (σR2) of the substrate; and separating the substrate after introducing the defects by applying a stress along the separation line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.