Coating processes for vacuum chamber arrangements and apparatus thereof

US11618950B2 · kind B2 · utility

Assignee

• VON ARDENNE Asset GmbH & Co KG · DE

Inventors

• Lutz Gottsmann
• Georg Laimer · Meißen, DE
• Jens Melcher · Dresden, DE

Key dates

• Filing date: Mar 23, 2021
• Grant date: Apr 4, 2023
• Expiry date: Dec 1, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/677
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Coating processes for vacuum chamber arrangements and apparatus thereof are herein disclosed. In some aspects, a coating process may include coating at least one workpiece using a vacuum chamber arrangement. The vacuum chamber arrangement may include a vacuum chamber, a substrate holding arrangement, an additional substrate holding arrangement, one or more bearings, a supply hose and an additional supply hose. The vacuum chamber may include a lock chamber, an additional lock chamber, a heating chamber, an additional heating chamber, and a coating chamber. The one or more bearings may support the substrate holding arrangement in such a way that it can be moved between the lock chamber and the coating chamber. The one or more bearings may also support the additional substrate holding arrangement in such a way that it can be moved between the additional lock chamber and the coating chamber.