Method for automatically replacing high-pressure gas barrels
US11619355B2 · kind B2 · utility
1Cited by
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16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 19, 2018 |
| Grant date | Apr 4, 2023 |
| Priority date | — |
| Expiry date | Apr 23, 2040 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C2270/0518
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Disclosed is a method for automatically replacing high-pressure gas barrels, in which when loading a high-pressure gas barrel is loaded on the lift of a cabinet so as to supply gas to the wafer production line in the semiconductor fabrication FAB process facility, at the time point of replacement of the high-pressure gas barrel, a used high-pressure gas barrel is separated from a connector holder and then a new high-pressure gas barrel is connected to the connector holder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.