Method for producing a pressure sensor device and pressure sensor device

US11619559B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Elmar Kroner · Tamm, DE
• Friedhelm Guenter · Burgstetten, DE
• Ingo Kesel · Oberaichen, DE
• Joachim Friedl · Reutlingen, DE
• Philipp Scheiner · Eibelstadt, DE
• Robert Kuells · Detmold, DE

Key dates

• Filing date: Apr 26, 2021
• Grant date: Apr 4, 2023
• Expiry date: Jul 3, 2041

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2201/0264
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A method for producing a pressure sensor device. The method includes providing a vessel that includes a cavity having side walls, the cavity including a floor and the side walls each including an upper side, which face away from the floor; providing a pressure sensor and situating the pressure sensor in the cavity and on the floor; filling the cavity with an oil so that the oil fills the cavity up to the upper sides of the side walls; applying a membrane onto the surface of the oil that completely covers the oil, and at least in some regions onto the upper sides of the side walls so that the membrane covers, circumferentially around the cavity, those regions of the upper sides of the side walls that lie against the oil, the membrane including a liquid material when applied onto the oil; and curing the liquid material of the membrane.