Patent · US Active

Method and apparatus for determining optical constant of material, and method and apparatus for extending material database

US11619578B2 · kind B2 · utility

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8Claims

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Assignee

Nankai University · CN

Inventors

Meng-Xin Ren · Tianjin, CN
Jin Liu · Tianjin, CN
Di Zhang · Xing'an, CN
Jing Xu · Lanzhou, CN

Key dates

Filing date	Jun 9, 2020
Grant date	Apr 4, 2023
Priority date	—
Expiry date	Mar 19, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG01N2201/1296
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for determining an optical constant of a material includes: acquiring ellipsometric parameters; obtaining a optical constant of the material corresponding to the ellipsometric parameters by a machine learning model; the machine learning model including a mapping relationship between the ellipsometric parameters and the material optical constant of the material corresponding to the ellipsometric parameters. The method uses the machine learning model to implement an automatic fitting of ellipsometric parameters. In the method, the optical constant of the material is calculated by a machine learning model, which no longer depends on the experiences of the experimenters, thereby reducing requirements for the operator, accelerating the fitting of the data curve when calculating the optical constants of the material and improving the operation efficiency.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.