Method of manufacturing metal wire and metal wire grid, wire grid polarizer, electronic device
US11619773B2 · kind B2 · utility
0Cited by
6References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 24, 2019 |
| Grant date | Apr 4, 2023 |
| Priority date | — |
| Expiry date | Mar 15, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/427
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of manufacturing a metal wire, a method of manufacturing a metal wire grid, a wire grid polarizer, and an electronic device are provided. The method of manufacturing a metal wire includes: forming a metal material layer on a base substrate; etching the metal material layer by using a composite gas including an etching gas and a coating reaction gas to form the metal wire and a protective coating layer on a surface of the metal wire.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.