Apparatus for trapping of reaction by-product having self regenerating function for used inner collecting tower
US11623175B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2022 |
| Grant date | Apr 11, 2023 |
| Priority date | — |
| Expiry date | Mar 18, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2258/0216
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present disclosure provides an apparatus for trapping of a reaction by-product having a self regenerating function for a used inner collecting tower, and an object of the present disclosure is to provide the reaction by-product trapping apparatus configured such that the trapping apparatus positioned between a process chamber and a vacuum pump or between the vacuum pump and a scrubber stops operating during a semiconductor manufacturing process when a trapping reaction of trapping a reaction by-product reaches a saturated state during a trapping operation, and the trapping apparatus removes the reaction by-product produced in an inner collecting tower through a heating reaction, such that the inner collecting tower is regenerated to enable an additional trapping reaction to be performed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.