Method for detecting, controlling and automatically compensating pressure in a polishing process
US11623323B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 18, 2017 |
| Grant date | Apr 11, 2023 |
| Priority date | — |
| Expiry date | Sep 17, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/45199
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The invention relates to a method for detecting, controlling and automatically compensating pressure in a polishing process, including: detecting a pressure between a polishing wheel and a polished workpiece by a detection shaft or a moment generated on the detection shaft, and outputting the detected pressure or moment to a controller; comparing the detected pressure or moment with a preset pressure or moment and determining whether there is a difference between them; calculating a compensation feeding amount based on the difference and outputting an adjustment signal to an adjustment shaft based on the compensation feeding amount; and moving the adjustment shaft correspondingly based on the adjustment signal so as to drive the polishing wheel or the polished workpiece to move correspondingly to adjust a relative position between the polishing wheel and the polished workpiece so that the difference keeps consistent.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.