Mirror unit and optical module
US11629946B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2018 |
| Grant date | Apr 18, 2023 |
| Priority date | — |
| Expiry date | Apr 2, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/104
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.