Process for manufacturing a microbolometer containing vanadium oxide-based sensitive material
US11629999B2 · kind B2 · utility
0Cited by
1References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 15, 2021 |
| Grant date | Apr 18, 2023 |
| Priority date | — |
| Expiry date | Oct 15, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/046
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microbolometer may include a sensitive material based on vanadium oxide (VOx) with an additional chemical element such as boron (B), but excluding nitrogen (N), the sensitive material wherein the sensitive material (i) is amorphous, (ii) has an electrical resistivity at ambient temperature in a range of from 1 to 30 Ω·cm, (ii) has a homogeneous chemical composition, and (iv) has an amount of boron, defined as a ratio of a number of boron to vanadium atoms to that of vanadium, at least equal to 0.086.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.