Method and test system for assessing the quality of a multi-channel micro- and/or subwavelength-optical projection unit

US11630026B2 · kind B2 · utility

Assignee

• SUSS MICROOPTICS SA

Inventors

• Isabel Agireen · Garching an der Alz, DE
• Katrin SCHINDLER · Garching an der Alz, DE
• Wilfried Noell · Neuchâtel, CH
• Sophiane Tournois · Garching an der Alz, DE
• Susanne Westenhoefer · Wettswil, CH

Key dates

• Filing date: Sep 2, 2020
• Grant date: Apr 18, 2023
• Expiry date: Apr 9, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/9583
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for assessing the quality of a multi-channel micro- and/or subwavelength-optical projection unit is disclosed. The method comprises the following steps: At least a predefined portion of the optical projection unit is illuminated so that an image is generated by at least two channels of the predefined portion of the multi-channel optical projection unit. At least one characteristic quantity is determined based on the analysis of the image, wherein a value of the characteristic quantity is associated with a characteristic feature of the projection unit, a defect of the projection unit and/or a defect class of the projection unit. The quality of the projection unit is assessed based on the at least one characteristic quantity. Moreover, a test system for assessing the quality of a multi-channel micro- and/or subwavelength-optical projection unit and a computer program are disclosed.