Measuring method for semiconductor gas sensor based on alternating-current impedance
US11630074B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 11, 2021 |
| Grant date | Apr 18, 2023 |
| Priority date | — |
| Expiry date | Jul 28, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R27/2605
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention discloses a measuring method for a semiconductor gas sensor based on alternating-current impedance. The method includes the steps: connecting the semiconductor gas sensor to a capacitor in parallel, connecting an alternating-current impedance measuring device to the semiconductor gas sensor and the capacitor, combining measuring parameters under measuring frequencies within a first preset range and parallel capacitance values within a second preset range, and measuring a gas with a known concentration according to each of nine features under each combination; traversing all parameter combinations and all the nine features to obtain a plurality of feature values corresponding to the same gas concentration under each feature; and selecting measuring frequencies within a third range, parallel capacitance values within a fourth range and a certain or several of the corresponding features as measuring parameters finally selected for measuring an unknown gas concentration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.