Sensor and electronic device
US11630121B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 2021 |
| Grant date | Apr 18, 2023 |
| Priority date | — |
| Expiry date | Aug 31, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0817
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
According to one embodiment, a sensor includes a first detection element, and a processing part. The first detection element includes a base body, a first supporter fixed to the base body, a first movable part, first and second counter conductive parts. The first movable part is supported by the first supporter and separated from the base body. The first movable part includes a first movable base part supported by the first supporter, a second movable base part connected with the first movable base part, a first movable beam including a first beam, and a second movable beam including a second beam. The first beam includes a first end portion and a first other end portion. The second beam includes a second end portion and a second other end portion. The first counter conductive part faces the first movable beam. The second counter conductive part faces the second movable beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.