Adiabatic optical switch using a waveguide on a MEMS cantilever
US11630266B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 17, 2019 |
| Grant date | Apr 18, 2023 |
| Priority date | — |
| Expiry date | Jan 17, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12145
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical switching device (20) includes a substrate (39) and first and second optical waveguides (23, 25) having respective first and second tapered ends (62, 64), which are fixed on the substrate in mutual proximity one to another. A pair of electrodes (36, 38) is disposed on the substrate with a gap therebetween. A cantilever beam (32) is disposed on the substrate within the gap and configured to deflect transversely between first and second positions within the gap in response to a potential applied between the electrodes. A third optical waveguide (21) is mounted on the cantilever beam and has a third tapered end (60) disposed between the first and second tapered ends of the first and second waveguides, so that the third tapered end is in proximity with the first tapered end when the cantilever beam is in the first position and is in proximity with the second tapered end when the cantilever beam is in the second position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.