Optical scanning microscope and examination method

US11630292B2 · kind B2 · utility

Assignee

• LEICA MICROSYSTEMS CMS GMBH · DE

Inventors

• Christian Schumann · Gießen, DE
• Albrecht Weiss · Linden, DE
• Tobias Bauer · Königstein, DE
• Cornell Peter Gonschior · Friedberg, DE

Key dates

• Filing date: May 12, 2017
• Grant date: Apr 18, 2023
• Expiry date: Nov 9, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/0076
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical scanning microscope includes an illumination system having a light source portion emanating from a light source, first and second polarizing beam splitters, and first and second optical channels disposed between the beam splitters. The light source portion is configured to emit a first illumination light beam comprising light of a first main polarization direction and of a second main polarization direction. The first beam splitter is configured to guide the light primarily into the first and channels, respectively. The second beam splitter is configured to form a second illumination light beam from light of the first and second main polarization directions from the first channel and second channels, respectively. The first and second channels are configured to emit the light of the first and second main polarization directions from the first and second channels, respectively, so as to have different types of convergence.