Transversely-excited film bulk acoustic resonator comprising small cells
US11632096B2 · kind B2 · utility
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73References
26Claims
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Key dates
| Filing date | Dec 3, 2021 |
| Grant date | Apr 18, 2023 |
| Priority date | — |
| Expiry date | Dec 3, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K7/2039
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices are disclosed. An acoustic resonator device includes a plurality of cells electrically connected in parallel. Each cell includes an interdigital transducer (IDT) on a piezoelectric plate, the IDT having at least 15 and not more than 35 interleaved fingers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.