Microphone MEMS diaphragm and self-test thereof
US11632639B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 25, 2022 |
| Grant date | Apr 18, 2023 |
| Priority date | — |
| Expiry date | Feb 25, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2201/003
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A device includes a micro-electromechanical system (MEMS) element configured to sense acoustic signals. The device also includes a circuitry configured to enable the microphone element to sense the acoustic signals. The circuitry is further configured to disable the microphone element to prevent the microphone element to sense the acoustic signals. It is appreciated that the circuitry is further configured to apply a test signal to the MEMS element when the microphone element is disabled. The microphone element outputs a signal in response to the test signal to the circuitry. The circuitry in response to the output signal with a first value determines that a diaphragm of the MEMS element is nonoperational and the circuitry in response to the output signal with a second value determines that the diaphragm of the MEMS element is operational.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.