Diamond on nanopatterned substrate

US11634834B2 · kind B2 · utility

Assignee

• The Government of the United States of America, as represented by the Secretary of the Navy · US

Inventors

• Karl D. Hobart · Alexandria, US
• Tatyana I. Feygelson · Springfield, US
• Marko J. Tadjer · Greenbelt, US
• Travis J. Anderson · Alexandria, US
• Andrew D. Koehler · Alexandria, US
• Samuel Graham, Jr. · Atlanta, US
• Mark Goorsky · Valencia, US
• Zhe Cheng · Atlanta, US
• Luke Yates · Albuquerque, US
• Tingyu Bai · Los Angeles, US
• Yekan Wang · Los Angeles, US

Key dates

• Filing date: Aug 24, 2021
• Grant date: Apr 25, 2023
• Expiry date: Jan 1, 2042

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L23/3732
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method for growing polycrystalline diamond films having engineered grain growth and microstructure. Grain growth of a polycrystalline diamond film on a substrate is manipulated by growing the diamond on a nanopatterned substrate having features on the order of the initial grain size of the diamond film. By growing the diamond on such nanopatterned substrates, the crystal texture of a polycrystalline diamond film can be engineered to favor the preferred <110> orientation texture, which in turn enhances the thermal conductivity of the diamond film.