Electrostatically actuated device
US11635235B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 2019 |
| Grant date | Apr 25, 2023 |
| Priority date | — |
| Expiry date | Jul 23, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02B30/00
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A device including a bottom electrode on a substrate and a top electrode on a substrate separated by a fixed distance from each other. Semi-insulator layers with proper electrical conductivity are attached to the bottom and top electrodes. Disposed between the substrates is a flexible S-shaped polymer stack having electrode layers with one end of the stack attached to the top substrate and the other end in contact with the bottom substrate. When a voltage is applied between the stack and the electrode layer on the bottom substrate, the stack is induced by electrostatic force to deflect in a rolling wave-like motion. While the voltage applied between the stack and bottom electrode is turned off, the static charges on the semi-insulator layer can move away quickly due to the proper electrical conductivity of the semi-insulator layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.