Optical probe, Raman spectroscopy system, and method of using the same
US11635327B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2018 |
| Grant date | Apr 25, 2023 |
| Priority date | — |
| Expiry date | Aug 15, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/08
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is an optical probe, and a Raman spectroscopy system using such, including excitation and detection optics coupled to a sampling optics via a beam splitter, in confocal arrangement with a sample focal plane of the sampling optics. The detection optics is arranged to receive Raman signal from the sample focal plane and direct it onto a tip of a detection optical fiber. The optical probe may further include a positioning device mechanically coupled to the sampling optics and configured to control a position of the sample focal plane. In the Raman spectroscopy system a light source is coupled to the excitation optics via an excitation optical fiber, and a spectrometer is coupled to a detection optics via a detection optical fiber. Provided is further a method for measuring Raman signal depth profile in a sample, wherein sample's Raman spectra is measured and stored at different focal plane positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.