Optical device
US11635613B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2018 |
| Grant date | Apr 25, 2023 |
| Priority date | — |
| Expiry date | Dec 8, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/001
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An optical device includes an elastic support portion which includes a torsion bar extending in a second direction perpendicular to a first direction and a nonlinearity relaxation spring connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A first comb finger of a first comb electrode and a second comb finger of a second comb electrode which are adjacent to each other face each other in the second direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.