Conical pocket laser-sustained plasma lamp
US11637008B1 · kind B1 · utility
2Cited by
7References
18Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Aug 18, 2022 |
| Grant date | Apr 25, 2023 |
| Priority date | — |
| Expiry date | Aug 18, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/213
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A plasma lamp for use in a broadband plasma source of an inspection tool is disclosed. The plasma lamp includes a plasma bulb configured to contain a gas and generate a plasma within the plasma bulb. The plasma bulb is formed from a material at least partially transparent to illumination from a pump laser and at least a portion of broadband radiation emitted by the plasma. The plasma bulb includes a conical pocket. The conical pocket is configured to disrupt a plume rising from the plasma.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.