Methods of fabricating micro-valves and jetting assemblies including such micro-valves
US11639057B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 9, 2019 |
| Grant date | May 2, 2023 |
| Priority date | — |
| Expiry date | Feb 1, 2042 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/0092
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method of constructing a micro-valve includes providing a substrate for an actuating beam of the micro-valve, the substrate including a first surface and a second surface. The method also includes forming a plurality of constituent layers on the first surface of the actuating beam, including a layer of piezoelectric material. The method also includes removing a portion of the substrate from at least one of the first surface or the second surface to define a cantilevered portion of the actuating beam. The method also includes providing an orifice plate including an orifice. The method also includes providing a valve seat on a surface of the orifice plate, the valve seat having an opening aligned with the orifice. The method also includes attaching the surface of the orifice plate to the second surface via an adhesive such that an overlapping portion of the cantilevered portion overlaps the orifice.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.