Apparatus for manufacturing polysilicon rod
US11639293B2 · kind B2 · utility
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Key dates
| Filing date | Jun 11, 2021 |
| Grant date | May 2, 2023 |
| Priority date | — |
| Expiry date | Dec 2, 2041 |
Classification
- Technology area (CPC —)General
Abstract
An apparatus for manufacturing polysilicon rod by a Siemens method has a base plate 20; and a holding body 100 provided on the base plate 20 so as to be movable in a horizontal direction and electrically connect between a core wire holder 1 and an electrode 4. The holding body 100 is configured to rotatably hold the core wire holder 1 with respect to the base plate 20.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.