Three-axis microelectromechanical system (MEMS) gyroscope
US11639852B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 2, 2020 |
| Grant date | May 2, 2023 |
| Priority date | — |
| Expiry date | Apr 2, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5733
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A three-axis microelectromechanical system (MEMS) gyroscope includes four proof masses, where the proof masses are connected by spring beams and/or rigid beams; a first proof mass is configured to move in an X-axis direction; a second proof mass is configured to rotate around an X-direction axis, a Y-direction axis, and a Z-direction axis, and when the first proof mass moves in the X-axis direction, the second proof mass is driven to rotate around the Z-direction axis; a third proof mass is configured to move in the X-axis direction and a Y-axis direction, and when the first proof mass moves in the X-axis direction, the third proof mass is driven to move in the Y-axis direction; a fourth proof mass is configured to move in the X-axis direction, and when the third proof mass moves in the X-axis direction, the fourth proof mass is driven to move in the X-axis direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.