Device for determining the dew point of a gas in a process chamber and heat treatment device having such a device for determining the dew point
US11639907B2 · kind B2 · utility
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10Claims
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Assignee
Inventors
Key dates
| Filing date | May 31, 2018 |
| Grant date | May 2, 2023 |
| Priority date | — |
| Expiry date | Mar 24, 2040 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61L2202/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device (1) for determining the dew point of a gas in a process chamber (2) which comprises a temperature control element (3) and a temperature sensor (4) for determining the temperature in the process chamber (2). The temperature sensor is in a thermally conductive functional connection with the temperature control element (3), and the temperature control element (3) is designed to actively heat and cool the temperature sensor (4). The temperature sensor is arranged in direct contact with the temperature control element (3).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.