Methods for confirming charged-particle generation in an instrument, and related instruments
US11640904B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Jan 25, 2021 |
| Grant date | May 2, 2023 |
| Priority date | — |
| Expiry date | Jan 25, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/403
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Methods for confirming charged-particle generation in an instrument are provided. A method to confirm charged-particle generation in an instrument includes providing electrical connections to a charged-particle optics system of the instrument while the charged-particle optics system is in a chamber. The method includes coupling an electrical component having an impedance to charged-particle current generated in the chamber. Moreover, the method includes measuring an electrical response by the electrical component to the charged-particle current. Related instruments are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.