Suction device
US11642794B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 6, 2018 |
| Grant date | May 9, 2023 |
| Priority date | — |
| Expiry date | Jan 18, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6838
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A suction device that holds a member by suction in a stable manner is provided. The suction device includes a columnar main body, a flat end face formed on the main body, a concave part formed in the end face, a fluid flow-forming supply paths for forming a fluid swirl flow in the concave part by discharging fluid into the concave part, the fluid swirl flow generating negative pressure that applies suction to a member, and a linear guide groove formed on the end surface along a direction in which the fluid discharged into the concave part flows out of the concave part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.