Tiltable and rotatable substrate carrier and multi-layer vacuum deposition system comprising same
US11643718B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 27, 2020 |
| Grant date | May 9, 2023 |
| Priority date | — |
| Expiry date | Oct 27, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68764
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A module for operating a carrier of one or more substrates to be treated in a vacuum deposition method includes a frame provided with a plate receiving, on a first side, an electronic assembly comprising radio transmitter/receiver electronics, a processor card, motor controller electronics and a battery for supplying power to the module. The processor card has a program memory with a program for controlling the motor controller electronics according to data received from a remote apparatus provided with a radio transmitting/receiving device for communicating with the module's radio transmitter/receiver electronics and, on a second side, a device for operating the carrier, which device is provided with a first motor for rotating the carrier about a first axis parallel to the plate and with a second motor for rotating the carrier about a second axis perpendicular to the plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.