Optical position measuring device

US11644348B2 · kind B2 · utility

Assignee

• DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

• Thomas Kaelberer · Schrobenhausen, DE
• Wolfgang Holzapfel · Obing, DE

Key dates

• Filing date: Feb 2, 2021
• Grant date: May 9, 2023
• Expiry date: Aug 1, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01D5/34746
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An optical position measuring device for recording a relative position of two scales includes the scales. The longitudinal extents of the scales are oriented parallel to a first and second measuring direction. A horizontal plane of movement is spanned by these measuring directions. A light source is configured to emit an illumination beam that is split into at least two sub-beam bundles at the first scale. The sub-beam bundles subsequently impinge on the second scale, which is tilted about the direction of the longitudinal extent thereof relative to the horizontal plane of movement, and are back-reflected to impinge again on the first scale and are recombined there such that a resulting signal beam is subsequently propagated toward a detection unit, via which phase-shifted scanning signals are generatable with respect to a relative movement of the scales along a third perpendicular measuring direction and the first or second measuring direction.