Flow control module with a thermal mass flow meter
US11644353B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 6, 2019 |
| Grant date | May 9, 2023 |
| Priority date | — |
| Expiry date | Feb 7, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flow control module with a thermal mass flow meter is provided. The thermal mass flow meter facilitates measuring both a flow rate and a temperature of a fluid passing through the flow control module. Fluids may experience different flow characteristics at different temperature ranges. The flow control module includes a proportional control valve for selectively adjusting the flow rate of the fluid passing through the flow control module. Upon detecting that the temperature of the fluid is outside of a temperature range for the fluid, a controller is configured to load a different set of calibration parameters for controlling the operation of the proportional control valve to accommodate the different flow characteristics of the fluid at that temperature. Additionally, the controller is configured to detect bubbles using the thermal mass flow meter based upon the difference in thermal conductivity of gasses and liquids.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.