Interdigitated capacitive sensor for real-time monitoring of sub-micron and nanoscale particulate matters
US11650144B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Feb 11, 2021 |
| Grant date | May 16, 2023 |
| Priority date | — |
| Expiry date | Aug 8, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/135
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Aspects of the present disclosure involve systems, methods, and the like, for a fabrication of a particulate matter (PM) sensor that utilizes a capacitance sensor to detect sub-micrometer and nanoparticles in the respirable range of an environment. In one implementation, the capacitance sensor may comprise interdigitated electrodes between which a capacitance may be measured. PM deposited on the sensor may cause the capacitance between the electrodes to be altered and such a change in capacitance may be measured by the PM sensor. This measurement of the change in capacitance of the interdigitated capacitance sensor may therefore be correlated to the presence of sub-micrometer and nanoparticles in an environment. In one particular implementation, the PM sensor may further include a micro-heater circuit, a readout circuit, and an interface connecting the readout circuit to the micro-heater/capacitance sensor of the PM sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.