Electrode defined resonator
US11652465B2 · kind B2 · utility
3Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 9, 2021 |
| Grant date | May 16, 2023 |
| Priority date | — |
| Expiry date | Aug 9, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/176
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A bulk acoustic resonator operable in a bulk acoustic mode includes a resonator body mounted to a separate carrier that is not part of the resonator body. The resonator body includes a piezoelectric layer, a device layer, and a top conductive layer on the piezoelectric layer opposite the device layer. A surface of the device layer opposite the piezoelectric layer is for mounting the resonator body to the carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.