Patent · US Active

Integrated circuit stress sensor

US11653568B2 · kind B2 · utility

2Cited by

1References

26Claims

0Family size

Assignee

TEXAS INSTRUMENTS INCORPORATED · US

Inventors

Baher Haroun · Allen, US
Tobias Bernhard Fritz · Seukendorf, DE
Michael Szelong · Sunnyvale, US
Ernst Muellner · Munich, DE

Key dates

Filing date	Dec 29, 2020
Grant date	May 16, 2023
Priority date	—
Expiry date	Apr 11, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH10N39/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An integrated circuit is described herein that includes a semiconductor substrate. First and second piezoresistive sensors are on or in the substrate where each have a respective sensing axis extending in first and second directions respectively parallel with a surface of the substrate, where the second direction is perpendicular to the first direction. A third piezoresistive sensor is on or in the substrate and has a respective sensing axis extending in a third direction parallel with the surface of the substrate and neither parallel nor perpendicular to the first and second directions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.