Active stiction recovery
US11655139B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 10, 2020 |
| Grant date | May 23, 2023 |
| Priority date | — |
| Expiry date | Feb 22, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0874
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device includes a micro-electromechanical system (MEMS) device layer comprising a proof mass. The proof mass includes a first proof mass portion and a second proof mass portion. The first proof mass portion is configured to move in response to a stimuli. The second proof mass portion has a spring attached thereto. The device further includes a substrate disposed parallel to the MEMS device layer. The substrate comprises a bumpstop configured to limit motion of the first proof mass portion. The device includes a first electrode disposed on the substrate facing the second proof mass portion. The first electrode is configured to apply a pulling force onto the second proof mass portion and to move the second proof mass portion towards the first electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.