Bellows diaphragm assembly
US11655912B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 14, 2021 |
| Grant date | May 23, 2023 |
| Priority date | — |
| Expiry date | Jan 14, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0113
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A diaphragm assembly for a mass flow controller is disclosed. The diaphragm assembly includes an aperture, side walls extending from the aperture and disposed about a central axis, the side walls including multiple convolutions, and a poppet including an interior surface facing the aperture and exterior sealing surface. At least a portion of the diaphragm assembly moveable extends and retracts within a control valve cavity of the mass flow controller. A push rod extending from the interior surface of the poppet moves, responsive to an actuator of the mass flow controller, to enable the exterior sealing surface of the poppet to open and close a flow path through the control valve cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.